Stefan Witte

Stefan Witte is a Professor at the Department of Imaging Physics within the Faculty of Applied Sciences at Delft University of Technology. He concurrently holds the position of Associate Professor at the Vrije Universiteit Amsterdam since 2019. Previously, from 2014, he worked at the Advanced Research Center for Nanolithography (ARCNL), leading the EUV Generation and Imaging group and serving as Head of the Metrology Department.

His academic journey began with a PhD (cum laude) in 2007 from the Vrije Universiteit Amsterdam, focusing on intense ultrafast laser development and precision spectroscopy with frequency combs. He then pursued postdoctoral research at the same university in nonlinear microscopy and biomedical imaging, followed by work at JILA, University of Colorado on ultrafast electron dynamics and lensless imaging using high-harmonic sources.

Professor Witte's primary research interest lies in Optics for nanoscale metrology. His work encompasses ultrafast laser systems, frequency comb spectroscopy, nonlinear optical microscopy, biomedical imaging applications, and cutting-edge lensless imaging techniques with high-harmonic and soft-X-ray radiation. These research areas are critical for advancing nanoscale measurement science, particularly in semiconductor metrology and biomedical diagnostics.

His exceptional contributions have been honored with multiple prestigious grants: an ERC Starting Grant (2014), an ERC Consolidator Grant (2019), and an NWO VICI grant (2022). He also leads as a Principal Investigator in the NWO-TTW Perspectief consortium LINX, dedicated to Lensless Imaging with soft-X-rays.

At ARCNL, Professor Witte directed the EUV Generation and Imaging group, playing a pivotal role in the development of extreme ultraviolet (EUV) lithography technologies. His current research at TU Delft continues to innovate in optical metrology, pushing the limits of resolution and precision for nanoscale applications.