Won-Jun Lee

Won-Jun Lee is a Professor at the Department of Nano Technology and Advanced Materials Engineering, Sejong University, Korea. He specializes in atomic layer deposition (ALD) and semiconductor material development, with a focus on dielectrics, interconnects, and phase-change materials for next-generation devices.

Education:

• B.A., KAIST, 1991
• M.A., KAIST, 1993
• Ph.D., KAIST, 1996

His research spans process development, precursor evaluation, and reaction mechanism studies via density functional theory (DFT) simulations and in situ monitoring. Key areas include silicon oxide/nitride, metal deposition (Cu, Co, Ni, W), and GeSbTe alloys for memory applications.

Recent publications highlight ALD of titanium oxide (2022), GeSbTe composition control (2022), silicon oxide with ozone (2022), and selective etching mechanisms (2023). These works integrate computational modeling with experimental validation, emphasizing semiconductor fabrication.