معرفی
Yasin Ekinci is Head of the Laboratory for X-ray Nanoscience and Technologies at Paul Scherrer Institute (PSI), leading 6 research groups with approximately 70 scientists. He oversees three synchrotron beamlines at SLS and an X-ray free-electron laser beamline at SwissFEL. His research spans EUV lithography, nanoscale patterning, metrology, and nanofluidics, with strong industrial collaborations in semiconductor manufacturing.
Education includes a BSc in Physics (Middle East Technical University), MSc in Engineering Sciences (University of De Montfort), and PhD from Max-Planck Institute. Research focuses on developing world-record resolution photolithography (6nm half-pitch) and novel nanofluidic devices for biomedical applications.
Recent work advances ultra-high-resolution lithography techniques and materials, with publications demonstrating innovations in resist chemistry, mask inspection, and nanoscale patterning. Research domains include materials science, optical engineering, and semiconductor physics.
Awards include the Young Investigator Award (2009) and SPIE Fellowship. Manages an 8M CHF annual budget, supervises MSc/PhD students, and serves on editorial boards and conference committees.
