Mustafa Yavuz

Mustafa Yavuz is a Professor and Director of the Nano and Micro Systems Lab (NMSL) at the University of Waterloo, Canada, affiliated with Mechanical & Mechatronics Engineering, System Design Engineering, and Electrical & Computer Engineering. He holds cross-appointments in multiple departments and has been a faculty member since 2009. His research focuses on Opto-Nano/MEMS devices, quantum electronic solids, graphene, and superconductors. Yavuz has supervised over 28 graduate students and postdoctoral fellows, leading to impactful contributions in sensors, nanomaterials, and energy harvesting. He has authored/co-authored numerous articles and holds patents in MEMS and nanotechnology. His awards include the University of Waterloo Research Excellence Award (2018) and international fellowships from MINATEC and JSPS.

Education:

• Ph.D. Materials Engineering (University of Wollongong, 1996)
• Ph.D. Applied Physics (University of Wollongong, 1995)
• M.Sc. Materials Engineering (Middle East Technical University, 1991)
• B.Sc. Materials Engineering (Middle East Technical University, 1989)

Research Interests: Yavuz specializes in advanced materials and MEMS/NEMS technologies, including opto-nano-MEMS devices, quantum electronic solids (superconductors, graphene), and functional nanomaterials for sensors and energy systems. His work integrates fabrication, packaging, and reliability testing of nanoscale devices for applications in photonics, biomedical sensing, and environmental monitoring. Recent trends in his articles highlight innovations in resonant MEMS mirrors, graphene-based biosensors, and laser-functionalized 2D materials.

Scientific Awards:

• MINATEC Fellowship (2019)
• Waterloo Engineering Research Excellence Award (2018)
• International Nanoarchitectonics Fellowship (2017)
• JSPS Fellowship (2007)

Advising & Grants: Yavuz has supervised 26 doctoral students and 28 postdoctoral researchers. His labs, including the NMSL and BioGraph Sense Inc., focus on MEMS packaging, nanojoining, and plasmonic biosensors. He has led projects funded by NSERC, CFI, and industry collaborations with companies like Apple, Samsung, and Smarter Alloys.

Labs/Teams: Director of the Nano and Micro Systems Lab (NMSL), co-founder of BioGraph Sense Inc., and collaborator in the Waterloo Institute for Nanotechnology (WIN). His research group develops cutting-edge nanoscale devices with applications in healthcare, energy, and environmental sensing.