Lawrence Overzet

Lawrence Overzet is a Professor in the Department of Electrical Engineering at The University of Texas at Dallas, within the Erik Jonsson School of Engineering and Computer Science. He has been a faculty member since 1988, progressing from Assistant to full Professor, and currently serves as Department Head. His research is central to plasma applications in semiconductor manufacturing.

• Ph.D., Electrical Engineering, University of Illinois, 1988
• M.S., Electrical Engineering, University of Illinois, 1986
• B.S., Electrical Engineering, University of Illinois, 1983

His research focuses on plasma physics for semiconductor processing, particularly pulsed plasmas and ion-ion plasmas, which offer advantages over conventional electron-ion plasmas. His group develops advanced diagnostics and has extensive expertise in plasma kinetics and plasma-wall interactions. Research spans from fundamental plasma chemistry to applications in nanomaterials synthesis.

The recent publications reflect a strong trend in low-pressure plasma systems with applications in nanomaterials (especially carbon nanotubes), liquid precursor injection, and fluorocarbon etch chemistry. These works demonstrate interdisciplinary innovation at the intersection of plasma engineering, materials science, and semiconductor fabrication.

Notable scientific awards include:

• 2021 Plasma Prize, AVS Plasma Science & Technology Division
• Polykarp Kusch Lecturer, UTD (2005)
• Honorary Member, Golden Key International Honour Society (2007)

Overzet has advised numerous students in plasma and nanomaterials research and has led projects funded by NSF, DoE, SRC, and industry partners. His work includes collaborations with Sandia National Laboratories and companies like Photronics. He holds multiple patents in plasma source design and contamination control. His leadership extends to guiding the Electrical Engineering department and promoting interdisciplinary plasma research.

He leads the plasma research group at UTD, which investigates fluorocarbon plasmas, carbon nanotube growth, and novel plasma sources. The team has presented at international conferences and collaborated with institutions such as the University of Houston and GREMI in France.