Lawrence J. Overzet

Lawrence J. Overzet is a Full Professor in the Department of Electrical & Computer Engineering at the University of Texas at Dallas (UT Dallas), affiliated with the Erik Jonsson School of Engineering and Computer Science. He holds positions as Associate Head of the EE Department since 2006 and is a Fellow of the AVS and Senior Member of the IEEE. His research focuses on plasma applications in semiconductor processing, including pulsed plasmas, ion-ion plasmas, and plasma diagnostics, supported by NSF, DoE, and industry partners.

Education: PhD, MSEE, and BSEE in Electrical Engineering from the University of Illinois at Urbana-Champaign. Overzet has taught courses such as Solid State Electronic Devices and Plasma Technology at both undergraduate and graduate levels.

Research interests emphasize experimental plasma studies with particular expertise in pulsed plasma dynamics, plasma etching/deposition, and development of diagnostic tools. Recent work includes investigations into thermal side effects of pulsed field ablation, plasma ignition mechanisms, and semiconductor fabrication techniques.

Awards include the UT System’s Regent’s Outstanding Teaching Award (2011) and recognition as UTD’s Polykarp Kusch Lecturer (2005). His lab, Plasma Science and Applications Laboratories, explores advancements in plasma technology for microelectronics and biomedical applications.