معرفی
Kristina Bespalova is a Researcher at Aalto University's Department of Electrical Engineering and Automation. Her work focuses on piezoelectric microelectromechanical systems (MEMS) and aluminum nitride (AlN) thin film technologies, bridging materials science and electrical engineering to advance MEMS fabrication and performance.
- Master's Degree in Engineering and Technology, LUT University (2018)
- Doctoral Thesis: Development of piezoelectric MEMS for multiaxial motion and sensing (Aalto University, 2024)
Her research explores the application of AlN in MEMS, particularly on vertical surfaces, enabling innovations in inertial sensing, actuator design, and thin film deposition techniques like atomic layer deposition (ALD) and chemical vapor deposition (CVD). She emphasizes enhancing thin film quality for microtechnology applications.
Her publications highlight trends in MEMS fabrication, AlN material science, and sidewall processing. Notable works include studies on high-quality AlN deposition methods and their impact on sensor development and microtechnology advancements.
- Scientific Award: JVST A Best ALD Paper Award (2021)
Bespalova collaborates internationally and contributes to the Electronics Integration and Reliability group at Aalto University, advancing MEMS and thin film research through interdisciplinary partnerships.
