ChaBum Lee

ChaBum Lee is an Associate Professor and Morris E. Foster Faculty Fellow in Mechanical Engineering at Texas A&M University. His research advances metrology and inspection for semiconductor manufacturing and precision systems.

Research focuses on interferometry, 3D imaging, machine tool metrology, robotic machining, and optical spectroscopy. Key innovations include diffraction-based via inspection, autonomous wafer defect detection, and non-contact surface profiling.

Recent publications emphasize semiconductor metrology advancements, including through-silicon via characterization, wafer edge inspection, and machine learning-driven quality control. Articles demonstrate integration of optics, sensors, and AI for manufacturing applications.

Awards include:

• ASME Blackall Machine Tool Award (2020)
• Institute of Physics Emerging Leader (2021)
• ASPE Best Researcher (2017)

Leads the Precision Metrology and Instrumentation Group (PMIG), collaborating with semiconductor industry partners including Samsung and Honeywell. Teaches courses in precision engineering and instrumentation.