Alain C. Diebold

Dr. Alain C. Diebold is an Empire Innovation Professor at the University at Albany's College of Nanoscale Science and Engineering, specializing in nanoscale metrology and semiconductor characterization. He directs research on advanced measurement techniques using optical spectroscopy and electron microscopy.

Research areas include:

• Nanoscale materials characterization for next-generation electronics
• Optical metrology development for semiconductor manufacturing
• Advanced microscopy techniques for nanostructures

His publications focus on semiconductor metrology innovations, with recent work on ferroelectric devices and 3D nanostructure characterization.

Awards and honors:

• SPIE and AVS Fellowships
• Faculty Researcher of the Year (2022)
• Graduate Mentor of the Year (2021)

He leads the Energy Technology Research & Innovation Lab with funding from TEL USA, SRC, and SEMATECH.