Fred L. Terry, Jr.

Professor Fred L. Terry, Jr. is a faculty member in the Electrical Engineering and Computer Science Department at the University of Michigan, College of Engineering, where he has spent his academic career advancing the understanding of electronic materials, semiconductor devices, and nondestructive characterization techniques.

Education

• Ph.D. in Electrical Engineering and Computer Science, Massachusetts Institute of Technology, June 1985. Dissertation: “Electron Traps and Interface State Generation in Nitrided Oxides” under Professor S. D. Senturia.
• M.S. in Electrical Engineering, MIT, June 1981. Thesis: “A New Silicon Oxynitride Process for MIS Devices”.
• B.S. in Electrical Engineering, MIT, June 1981.

Research Interests

Professor Terry’s research spans the physics and technology of electronic materials and nanostructures. He develops nondestructive characterization techniques, studies in-situ process monitoring for semiconductor manufacturing, and investigates the reliability of semiconductor devices—particularly under hostile environmental conditions. A current focus is the application of short- and mid-infrared spectroscopy for remote chemical detection, combining experimental work with computational scattering theories to model infrared spectra of particulate materials and their substrate interactions. Accurate calibration of infrared remote sensors is another active area.

Scientific Awards

No specific awards or honors are listed in the provided material.

Advising & Grants

While no individual students or funded projects are explicitly named, Professor Terry’s ongoing research activities imply active grant support and student mentoring within the EECS Department.

Laboratories & Teams

He is associated with the EECS Department laboratories at the University of Michigan, located in room 2308 EECS, 1301 Beal Avenue, Ann Arbor.