Deng Hui

Deng Hui is a tenured Associate Professor and doctoral supervisor in the Department of Mechanical and Energy Engineering at Southern University of Science and Technology (SUSTech), where he serves as Director of the Shenzhen Semiconductor Special Equipment Engineering Research Center and the Huawei-SUSTech Ultra-Precision Manufacturing and Measurement Innovation Laboratory. He established the Plasma Advanced Manufacturing Laboratory (APMLab) in 2017 and leads research focused on atomic-scale precision manufacturing technologies.

Education:

• Ph.D. in Precision Science & Technology, Osaka University (2016)
• M.A. in Precision Science & Technology, Osaka University (2013)
• B.Sc. in Mechanical Design and Automation, Huazhong University of Science and Technology (2010)

Dr. Deng's research spans atomic and near-atomic scale manufacturing, with emphasis on plasma-assisted and electrochemistry-assisted hybrid machining techniques. His work bridges fundamental atomic-scale physical and chemical reactions with practical applications in semiconductor manufacturing. The research focuses on two complementary approaches: developing non-stress atomic-level material removal methods for microscale atomic-precision manufacturing, and implementing numerical control machining algorithms for macroscale nanometer-precision manufacturing. His innovations address critical challenges in semiconductor manufacturing where atomic-level surface control is essential.

Analysis of his publication record reveals a consistent focus on plasma and electrochemical techniques for ultra-precision surface processing of challenging materials like silicon carbide, gallium nitride, and diamond. His work demonstrates progression from fundamental mechanisms to practical applications, with increasing emphasis on semiconductor manufacturing challenges in recent years.

Selected Awards:

• Rudolf Kingslake Award from SPIE (2016)
• Multiple listings in "Top 2% Scientists in the World" (2020-2023)
• Best Paper/Presentation Awards from international conferences
• Japan Machine Tool Technology Promotion Award (2014)

Dr. Deng actively mentors graduate students and has secured significant research funding for his laboratory. He serves on editorial boards for prestigious journals including International Journal of Extreme Manufacturing and Nanomanufacturing and Metrology. His laboratory maintains strong international collaborations, particularly with Osaka University in Japan, and has established partnerships with industry through the Huawei-SUSTech Innovation Laboratory.

The Plasma Advanced Manufacturing Laboratory (APMLab) focuses on cutting-edge research in atomic-scale material processing, with particular emphasis on semiconductor manufacturing applications. The lab maintains state-of-the-art plasma processing equipment and collaborates closely with semiconductor industry partners to address real-world manufacturing challenges requiring atomic-level precision.