Costas J. Spanos

Costas J. Spanos is a Professor in the Department of Electrical Engineering and Computer Sciences at the University of California, Berkeley. He holds academic leadership roles including former Director of the Berkeley Microfabrication Laboratory (1994-2000), Director of the Electronics Research Laboratory (2004-2005), and Associate Dean for Research in the College of Engineering (2004-2008). His research focuses on statistical analysis in integrated circuit design, semiconductor manufacturing optimization, and sensor technologies for process control. He has authored over 200 refereed articles and a seminal textbook on semiconductor manufacturing.

Education:

• Electrical Engineering Diploma, National Technical University of Athens (1980)
• M.S. Electrical and Computer Engineering, Carnegie Mellon University (1981)
• Ph.D. Electrical and Computer Engineering, Carnegie Mellon University (1985)

Research Interests: His work combines statistical methodologies with advanced manufacturing techniques. Key areas include process control systems, sensors for real-time monitoring, and automated diagnostics in semiconductor fabrication. He pioneered innovations in wafer-level sensor arrays and thermal management solutions for plasma etch processes.

Awards:

• IEEE Fellow (2000)
• Building and Environment Best Paper Award (2018)
• Distinguished Berkeley Faculty Mentor (2016)

Grants & Labs: Directs research at the Berkeley Microfabrication Laboratory and collaborates with the Berkeley Power and Energy Center. His work is supported by grants focusing on semiconductor process modeling and energy-efficient manufacturing systems.

Labs/Teams: Associated with the Integrated Modeling Process and Computation for Technology (IMPACT) initiative and CITRIS People and Robots (CPAR) collaborative projects.