Bo Cui

Professor Bo Cui is a distinguished faculty member at the University of Waterloo's Department of Electrical and Computer Engineering, where he serves as Director of the Waterloo Nanofabrication Group. His research focuses on cutting-edge nanofabrication techniques and their applications across multiple disciplines.

Professor Cui received his educational training at prestigious institutions: BSc in Physics from Peking University (1994), followed by MA (2000) and PhD (2003) in Electrical Engineering from Princeton University. After completing his doctoral studies under Professor Stephen Y. Chou at the Nanostructure Laboratory, he worked at the National Research Council of Canada before joining the University of Waterloo in 2008.

His research interests span micro-nanofabrication, lithography techniques, MEMS fabrication, microneedle technology, AFM probe fabrication, terahertz photoconductive antenna development, and dry plasma etching. Professor Cui's work bridges fundamental nanofabrication science with practical applications in biomedical devices, nanoelectronics, and photonics. His group has developed innovative methods for electron beam lithography on irregular surfaces, silicon microneedle fabrication, high aspect ratio AFM probes, and terahertz spectroscopy components.

Analysis of his recent publications reveals a strong focus on advancing nanofabrication capabilities, particularly in electron beam lithography techniques, plasmonic nanostructures for sensing applications, and novel resist materials. His work demonstrates consistent innovation in overcoming fundamental limitations in nanofabrication processes while maintaining practical relevance to industry applications.

Professor Cui leads the Waterloo Nanofabrication Group, which maintains extensive collaborations with industry partners in biomedical devices, sensors, and terahertz spectroscopy. The group utilizes state-of-the-art cleanroom facilities including electron beam lithography, focused ion beam, ICP-RIE/deep RIE, laser direct writing, and physical/chemical vapor deposition systems.