Triratna Muneshwarمشاهده پروفایل
استادیار
Dr. Triratna Muneshwar is an Assistant Professor in the Department of Metallurgical Engineering and Materials Science at the Indian Institute of Technology Bombay (IIT Bombay), where he has been serving since November 2021. His research focuses on advanced thin film deposition techniques, particularly atomic layer deposition (ALD) and atomic layer etching (ALE), for next-generation semiconductor devices. Ph.D. in Materials Engineering, University of Alberta, Canada (2014) Dual Degree (B.Tech & M.Tech) in Metallurgical Engineering and Materials Science, IIT Bombay (2009) His research interests lie at the intersection of materials science and semiconductor technology, with a strong emphasis on modeling and experimental analysis of vacuum thin film processes. He investigates atomic layer deposition of oxides, nitrides, and metals, surface reaction kinetics , dopant distribution in thin films , and parasitic reactions in high-aspect-ratio structures . His work bridges lab-scale innovation to industrial fabrication (Lab-to-Fab). Dr. Muneshwar's publications reveal a consistent focus on improving the precision, efficiency, and scalability of ALD processes. His work spans plasma-enhanced ALD , precursor chemistry , in-situ characterization , and numerical modeling of growth mechanisms. Key themes include precursor utilization optimization, nucleation control, and material characterization for logic and memory applications. Scientific recognitions include: Featured Article, Journal of Applied Physics (2016) Editors Pick, Journal of Applied Physics (2018) U.S. Patent on precursor utilization in pulsed ALD processes Dr. Muneshwar has mentored research at the postdoctoral and associate levels and continues to build a research program involving graduate students and collaborative projects. His prior experience includes a Postdoctoral Research Fellowship and Research Associate role at the University of Alberta. He is actively involved in advancing ALD/ALE technologies with industrial relevance. His research is conducted within the MEMS department at IIT Bombay, leveraging advanced fabrication and characterization facilities. He collaborates with teams working on semiconductor materials, nanofabrication, and process modeling, contributing to India's growing expertise in microelectronics and advanced materials.












