Xiuling Li

Xiuling Li is the Donald Bigger Willett Professor in Engineering at the University of Illinois at Urbana-Champaign, holding appointments in the Department of Electrical and Computer Engineering and serving as Interim Director of the Holonyak Micro and Nanotechnology Laboratory. Her research focuses on semiconductor nanostructures and devices.

Her work spans nanomaterials, RF/microwave circuits, and semiconductor fabrication. Key interests include nanowire growth, self-rolled membrane nanotechnology, and metal-assisted chemical etching. These innovations enable miniaturized electronics and novel device architectures.

Li's recent articles demonstrate advancements in 3D nanofabrication, wide-bandgap semiconductors, and heterogeneous integration. Her group consistently publishes in high-impact journals like ACS Nano and Nature Electronics.

• IEEE Fellow (2017)
• APS Fellow (2018)
• OSA Fellow (2019)
• National Academy of Inventors Fellow (2020)
• NSF CAREER Award

She leads substantial research initiatives including NSF and DARPA projects, advising doctoral students in nanofabrication and device physics. Her laboratory develops cutting-edge semiconductor processes and characterization techniques.