Silvania Pereira

Silvania Pereira is an Associate Professor at the Department of Imaging Physics within the Faculty of Applied Sciences at Delft University of Technology. Her academic journey includes a B.Sc. and M.Sc. in Physics from the University of Campinas (Brazil), a Ph.D. in Experimental Quantum Optics from the University of Texas (USA), and postdoctoral research at the University of Constance (Germany) and Leiden University (Netherlands). She has been a permanent member of TU Delft's Optics Research Group since 2000.

• Current research focuses: optical metrology, scatterometry, diffraction, vectorial optics, and nanostructure characterization
• Leadership roles: Member of PhotonicsNL board and Dutch Network of Women Professors

Her work centers on developing advanced optical techniques for nanoscale measurement, including coherent Fourier scatterometry for particle detection and structural analysis. Recent publications highlight innovations in:

• Broadband two-pulse scatterometry
• Steep side-wall angle calibration
• Thermo-optic device tuning
• Beam scanning methodologies

Scientific contributions include key awards like the Humboldt Fellowship and FOM Stimuleeringsfonds grant. She actively supervises students, contributes to optics education, and collaborates with international research networks like the European Optical Society.