معرفی
Cecilia Fasano is a Researcher at the Department of Physics and Astronomy, affiliated with the College of Liberal Arts and Sciences at the University of Iowa.
Research Interests: She specializes in microfabrication and its applications in astronomy, with a focus on electron beam lithography, semiconductor fabrication, and optical metrology. Her work addresses challenges in characterizing sub-micron feature placement accuracy over large areas, which is critical for semiconductor and optical device manufacturing.
Publications: Her recent article in Journal of Vacuum Science & Technology B introduces a method combining scanning electron microscopy, optical microscopy, and interferometric metrology to improve patterning fidelity in diffraction grating fabrication.
Scientific Recognition: The article was promoted as an Editor's Pick by the journal, highlighting its impact and quality.
Grants and Collaborations: The research was funded by
- NASA FINESST Grant No. 80NSSC21K1837
- NASA APRAs No. 80NSSC22K0159
- NASA APRAs No. 80NSSC22K0210
