Muharrem BayraktarView profile
Assistant Professor
Muharrem Bayraktar is an Assistant Professor at the MESA+ Institute for Nanotechnology at the University of Twente, specializing in XUV Optics. His research focuses on extreme ultraviolet (EUV) optics, plasma spectroscopy, and adaptive optical systems. He leads projects involving EUV source metrology, piezoelectric thin film actuators, and laser-driven plasma diagnostics. Research Interests: Bayraktar’s work centers on developing advanced EUV light sources for nanolithography applications. He investigates plasma physics in tin-based EUV emitters, optimizing thin film materials for adaptive optics, and improving spectral characterization techniques. His group explores piezoelectric thin films for precision wafer tables and multilayer mirror systems to enhance EUV beam control. Awards: 3rd Place in Simon Stevin Fellow Contest (2016) Best poster award (2018) Best poster award (2019) Advising & Activities: Supervises research on EUV source development and piezoelectric actuators. Engages in international collaborations on plasma diagnostics and adaptive optics. Active in presenting at conferences on topics like ‘EUV Source Metrology’ and ‘Nanolithography Systems’. Labs/Teams: Leads the XUV Optics team within MESA+, collaborating with industry partners on EUV lithography systems and advanced optical components.







