Hans ButlerView profile
Professor
Hans Butler is a part-time Full Professor in the Control Systems group of the Department of Electrical Engineering at Eindhoven University of Technology. He holds an MSc (1986) and PhD (1990) from Delft University of Technology. As an ASML Fellow, he specializes in dynamics and control systems with a focus on lithographic scanner control, particularly sub-nanometer positioning accuracy challenges. His work integrates physics-guided neural networks and advanced control strategies for mechatronic systems. Research interests include feedforward control design, vibration isolation, opto-mechatronics, and precision engineering applications. His contributions bridge academic research and industrial practice through collaborations with ASML, focusing on high-precision mechatronic systems used in semiconductor manufacturing. Butler has led teams in actuators development, system dynamics, and damping solutions at ASML since 1991. His recent work emphasizes data-driven methods and neural network implementations in control systems, supported by grants like NWO project 17973. He co-developed a MATLAB toolbox for physics-guided neural networks, fostering practical tooling for control engineers.