Steve Shu

Associate Professor Steve Shu is the Academic Director of the Research and Prototype Foundry (RPF) at the University of Sydney's Sydney Nanoscience Hub, part of the Australian National Fabrication Facility network. He holds a position in the School of Electrical and Computer Engineering within the Faculty of Engineering. With a B.Eng from Shanghai Jiaotong University (2002), M.Eng from Nanyang Technological University (2004), and Ph.D from the University of Melbourne (2007), his career spans over a decade in microelectronics industry roles at IMEC and ASML before academia.

His research focuses on metrology, precision mechatronics, and industrial AI applications. Key projects include EUV nanometrology systems and machine learning-based phase retrieval algorithms. He teaches courses like ELEC1004 and ELEC5405, and oversees capstone projects. Current research students include Zhiyi HUANG and Carson LIU.

Shu has secured grants such as the DSI Ignite project for ptychographic imaging software-hardware co-optimization. He is a Senior Member of IEEE and a Professional Member of the Australian Microscopy & Microanalysis Society.