Prem Pal

Prem Pal is a Professor in the Department of Physics at the Indian Institute of Technology Hyderabad. His work focuses on MEMS technology, silicon micromachining, and thin film applications in sensors and energy systems.

• Education: Ph.D. in MEMS from IIT Delhi (2004), M.Tech in Solid State Materials from IIT Delhi (1999)

His research spans wet anisotropic etching, microfluidic channels, and advanced MEMS fabrication techniques. He has developed novel processes for Borofloat glass and silicon wafer processing.

Key trends in his publications include isotropic/anisotropic wet etching, masking layer behavior, and optimization of etching solutions (e.g., NH4OH, KOH, NaOH) for MEMS devices. His work addresses surface texturization and structural dynamics of microcantilever beams.

Laboratory: Prem Pal leads the MEMS & Micro/Nano Systems Laboratory at IIT Hyderabad, advancing microsystem technologies and semiconductor physics applications.