Paul L. Bergstrom

Paul L. Bergstrom is a Professor in the Department of Electrical and Computer Engineering and an Affiliated Professor in Materials Science and Engineering at Michigan Technological University's College of Engineering. His research focuses on MEMS-microelectronics integration and novel materials for microsystems.

Dr. Bergstrom holds the following degrees:

• PhD in Electrical Engineering from the University of Michigan
• MS in Electrical Engineering from the University of Michigan
• BS in Electrical Engineering from the University of Minnesota

His research centers on integrating MEMS with CMOS processes while preserving device parameters, developing low-temperature MEMS materials, and advancing room-temperature quantum electronic devices using focused ion beam techniques. He also pioneers porous semiconductor applications in microfluidics and sensing, enabling breakthroughs in electro-osmotic pumps, chemical sensors, and nanoscale device fabrication.

Recent publications reveal a dual research trajectory: quantum electronics focusing on room-temperature single-electron transistors via nanofabrication, and porous silicon systems for microfluidic components. This work bridges nanoelectronics, materials science, and microsystem engineering with strong practical applications.

Dr. Bergstrom has not received documented scientific awards in the provided materials.

He teaches electronics and MEMS courses while leading substantial research funding including NSF's Wireless Integrated Microsystems ERC, DARPA's Nanomaterials Center, AFOSR propulsion projects, and Michigan's 21st Century Jobs Fund initiatives. Pending proposals target orthopedic implants and modular MEMS technologies.

His work operates through Michigan Tech's Microfabrication Facility with collaborations in the NSF ERC, focusing on nanoscale device fabrication and porous silicon applications for chemical sensing and microfluidics.