
About
P.L.Stephan Thamban is a Senior Lecturer II in the Department of Mechanical Engineering at the Erik Jonsson School of Engineering and Computer Science, The University of Texas at Dallas (UTD). He holds a PhD (2005) and MS (2002) in Mechanical Engineering from UTD. His research focuses on plasma processing, semiconductor manufacturing, and advanced material characterization techniques.
Key research interests include plasma etching, biocompatible material synthesis, optical emission spectroscopy, and thin film technologies. His work emphasizes process optimization, real-time diagnostics, and plasma chemistry analysis. Recent publications explore gas mixtures for silicon etching, pulsed plasma synthesis for biomedical applications, and endpoint detection systems for semiconductor fabrication.
- Awards: 2011 Recognition for inventive contribution at UTD; 2011 AVS International Symposium moderation invitation
Thamban's contributions bridge plasma physics and engineering applications, with instrumentation innovations for semiconductor manufacturing. His research spans interdisciplinary areas including material science, biomedical engineering, and nanoscale processing.
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