About
Dr. Marc J.M. Merkx is a postdoctoral researcher at the Applied Physics and Science Education school of Eindhoven University of Technology, affiliated with the Plasma & Materials Processing group. His work focuses on advanced atomic-scale processing techniques for nanoelectronics applications.
- Education:
- MSc in Applied Physics, Eindhoven University of Technology (2017)
- BSc in Physics, Eindhoven University of Technology (2015)
Research interests center on atomic layer deposition (ALD) and etching mechanisms, particularly for dielectric materials like Al2O3 and TaN. His work combines experimental characterizations (Fourier transform infrared spectroscopy, spectroscopic ellipsometry) with computational modeling of surface reactions.
Recent publications highlight his contributions to area-selective ALD using molecular inhibitors, exploring steric vs chemical passivation strategies, and revealing growth-per-cycle dynamics through random sequential adsorption theory. Collaborations with academic and industrial partners (Philips, Solliance) demonstrate practical applications for 3D nanostructures and semiconductor devices.
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