Gregory Denbeaux

Dr. Gregory Denbeaux is Associate Professor in Nanoscale Science & Engineering at SUNY Polytechnic Institute. His research investigates fundamental mechanisms in extreme ultraviolet (EUV) lithography, focusing on photoresist chemistry and nanofabrication processes critical for semiconductor manufacturing.

Research examines electron interactions in photoresist materials, acid generation mechanisms, and EUV exposure dynamics. Laboratory develops analytical methods to characterize resist performance, including outgassing analysis and reaction threshold measurements. Recent work explores metal-containing resists and secondary electron effects.

Publications establish mechanistic frameworks for EUV resist behavior, contributing to next-generation lithography development. Collaborative projects advance metrology capabilities for semiconductor manufacturing processes and materials characterization.